| 1. | Depends on the analysis of characteristics of excimer laser and the projection objective , a high multiple lens is designed , which is optimized by the professional software zemax , and then used in the accurate micro - machining . the system eliminate the lens aberration perfectly , and meet the requirement of machining at the precision of several microns
分析了目前主要的几种投影物镜系统特点,从光学设计理论出发,由专业光学设计软件zemax优化,设计加工了用于高精度准分子激光微孔加工的倍率为100 : 1的投影成像物镜。 |
